Ion Optics of Submicron Ion Beams

An electrostatic objective lens for focusing ion beams to very small diameters on a plane, conducting sample surface was designed. The lens can focus ions of either polarity in the decel-accel or accel-decel mode and collect and collimate secondary charged particles of either polarity emitted with low initial energy. Moreover, a microscopic mirror objective for visual observation of the sample surface in situ is incorporated in the electrostatic optics