Silizium/Silizium-Germanium Millimeterwellen-IC (SiGe-SIMMWIC) Abschlussbericht

SiGe-SIMMWIC (Silicon Germanium - Silicon Millimeter Wave Integrated Circuit) integration technologies for the fabrication of monolithic integrated mm-wave circuits on high resistivity silicon are described. An integration technology for avalanche transit time diodes was developed for the realization of all mm-wave functions of a transmitter and receiver on a single chip. Active dipole antennas have been fabricated with a radiated power of 10 mW at 76.5 GHz. Also active antennas for synchronization with 1/3 of the radiating frequency (76.5 GHz) have been realized with a radiated power of 3 mW at 76.5 GHz and a synchronization bandwidth of 380 MHz. For the first time monolithic integrated coplanar SIMMWIC mixers have been fabricated with a conversion loss of 7.8 dB at 76.5 GHz. For frequency stabilization and modulation a SiGe-heterobipolar (HBT) transistor technology was optimized with a maximum oscillation frequency around 80 GHz. With these SiGe HBTs and a newly developed coplanar integration technology on high resistivity silicon frist monolithic integrated coplanar LC oscillators have been realized with an output power of +4 dBm at 25.5 Ghz and +2 dBm at 38 GHz. Also, monolithic integrated coplanar buffer amplifiers have been fabricated with an amplification of 4 dB at 26 GHz. The system integration of a SiGe HBT oscillator with a synchronizable dipole antenna in a multi chip module (MCM) yields a frequency stabilized and a 137 MHz frequency modulated SIMMWIC front-end. The frequency stabilization of an IMPATT oscillator with a phase locked loop (PLL) was performed at the university of Ulm. CMOS circuits have been integrated on high resistivity silicon at the university of Stuttgart. The co-integration of high frequency SIMMWIC circuits with conventional CMOS signal processing circuits for a future single chip system integration is proved. (orig.)SIGLEAvailable from TIB Hannover: F97B444+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman