The research presented in this thesis explores work on micro and nanoscale patterning and structuring, towards 3D patterning of surfaces. The undertaking of such work is key to the advancement in areas such as microelectronics, nanotechnology and device and sensor fabrication. Chapter 1 (Nanotechnology: Introduction to Small Technology) presents an introduction to the background of the thesis research and information on the concepts and techniques used throughout the thesis. The first experimental chapter, Chapter 2 (Laying the Molecular Foundations) explores the patterning of monomolecular self-assembled-monolayers (instead of conventional polymeric resists) with electron beam lithography to form chemical patterns on gold surfaces. The che...