In quartz crystal substrates, microchannels were made by femtosecond laser assisted etching, i.e., irradiation of focused femtosecond laser pulses followed by wet etching. By the use of wet etching, the laser irradiated region was selectively etched out, and a microchannel was formed inside the quartz substrate. The laser irradiated region was found to be amorphous by transmission electron microscopy. Anisotropy in the etching rate inside the quartz was observed
We fabricate microchannels in fused silica by femtosecond laser irradiation followed by etching in d...
Microfabrication of glasses using laser assisted chemical etching was first demonstrated in 2001 by ...
Laser micromachining of ultrashort pulses is very important for surface and volume modification of v...
We use the combination of femtosecond laser dielectric modification and selective chemical etching t...
We report a systematical study on the liquid assisted femtosecond laser machining of quartz plate in...
We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructu...
The light intensity in a focused femtosecond laser pulse can be high enough to initiate non-linear a...
This paper analyzes laser and etching parameters to fabricate open and continuous microchannels and ...
The dependence of the etching rate on the ultrafast pulse shaping is observed when microchannels are...
We report on wet etching of photomodified regions in crystalline sapphire using KOH solution. Tightl...
Femtosecond laser micromachining is becoming an established technique for the fabrication of complex...
Channel formation in glasses is demonstrated and discussed. Photosensitive glass (Foturan) was micro...
We report on the effect of deposited energy for micro-machining of fused silica using femtosecond la...
<p>We report the influence of temporally decreasing pulse trains on femtosecond laser-induced chemic...
Microfluidic chambers embedded in silica glass are drilled by water-assisted ablation with a femtose...
We fabricate microchannels in fused silica by femtosecond laser irradiation followed by etching in d...
Microfabrication of glasses using laser assisted chemical etching was first demonstrated in 2001 by ...
Laser micromachining of ultrashort pulses is very important for surface and volume modification of v...
We use the combination of femtosecond laser dielectric modification and selective chemical etching t...
We report a systematical study on the liquid assisted femtosecond laser machining of quartz plate in...
We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructu...
The light intensity in a focused femtosecond laser pulse can be high enough to initiate non-linear a...
This paper analyzes laser and etching parameters to fabricate open and continuous microchannels and ...
The dependence of the etching rate on the ultrafast pulse shaping is observed when microchannels are...
We report on wet etching of photomodified regions in crystalline sapphire using KOH solution. Tightl...
Femtosecond laser micromachining is becoming an established technique for the fabrication of complex...
Channel formation in glasses is demonstrated and discussed. Photosensitive glass (Foturan) was micro...
We report on the effect of deposited energy for micro-machining of fused silica using femtosecond la...
<p>We report the influence of temporally decreasing pulse trains on femtosecond laser-induced chemic...
Microfluidic chambers embedded in silica glass are drilled by water-assisted ablation with a femtose...
We fabricate microchannels in fused silica by femtosecond laser irradiation followed by etching in d...
Microfabrication of glasses using laser assisted chemical etching was first demonstrated in 2001 by ...
Laser micromachining of ultrashort pulses is very important for surface and volume modification of v...