Channeling transmission of protons through thin silicon membranes

Typescript (photocopy).The emergent angular and energy distributions of 8-200 keV protons transmitted through thin (-oriented silicon membrane of 0.6 μm thickness, the half-width angle of the near Gaussian emergent particle distribution was 0.43° for an incident proton energy of 200 keV. The average energy loss of these particles was 10% less than for protons transmitted in random equivalent directions. Half-width angle measurements of the emergent distributions for the high-, intermediate-, and low-energy-loss components, as well as for the neutral component of the transmitted beam, are presented as functions of incident proton energy and film thickness for the major crystalline axes. Using nuclear and electronic multiple scattering theory as applied to the channeling concept, calculations of the half-width angle are presented and compared to the experimental results