The role of surface interaction probabilities in reactive plasma modelling

International audienceThis work concerns the role played by atomic species surface recombination coefficients and thermal energy accommodation coefficients at surfaces in plasmas produced in oxygen and chlorine. It is shown that these quantities significantly affect the dissociation fraction and neutral gas temperature predicted by self-consistent plasma simulations of an inductively coupled plasma source, and therefore have a major effect on the overall plasma equilibrium. By comparison of the model with experimental measurements the values of both surface interaction probabilities are derived as a function of neutral gas pressure