High Resolution, High Speed Detectors with Integrated JFET Electronics

For the European X-ray Multi-Mirror mission (XMM) and the German X-ray satellite ABRIXAS fully depleted pn-CCDs have been fabricated, enabling high speed, low noise, position resolving X-ray spectroscopy. The detector was designed and fabricated with a homogeneously sensitive area of 36 cm2 . At 150 K it has a noise of 5 e- rms only, with a readout time of the total focal plane array of 4 ms. The maximum count rate for single photon counting was 100.000 cps under flat field conditions. Its position resolution is in the order of 100 µm. The quantum efficiency is higher than 60% from 50 eV up to 15 keV. In addition, new cylindrical silicon drift detectors have been designed, fabricated and tested. They comprise an integrated on-chip amplifier system with continuous reset, on-chip voltage divider, electron accumulation layer stabilizer, large area, homogeneous radiation entrance window and a drain for surface generated leakage current. At count rates as high as 1.000.000 counts per s and per cm2 , they still show excellent spectroscopic behaviour at room temperature operation