The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon

Formation of buried high-resitant layers in silicon by two-step substoichiometric implantation of nitrogen IONS

Kamyshan, A. S.
Solov’yev, V. S.
Rusetsky, A. M.

January 1999

The implantation of nitrogen at an elevated temperature with a dose of (2,5-4)T016 ions/cm2 at 200 k...

Formation of buried high-resitant layers in silicon by two-step substoichiometric implantation of nitrogen IONS

Kamyshan, A. S.
Solov’yev, V. S.
Rusetsky, A. M.

January 1999

The implantation of nitrogen at an elevated temperature with a dose of (2,5-4)T016 ions/cm2 at 200 k...

ELSEVIER Bum Interactions with Yatarials 8 Atoms Enhanced surface hardness in nitrogen-implanted silicon carbide

C. Uslu A
D. H. Lee A
Y. Berta A
B. Park A
D. B. Poker B
L. Riester B

January 2016

Preliminary studies have been performed on the feasibility of carbon-silicon nitride formation Q3-Si...

The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon

Kolpakov, A. Ya.
Druchinina, O. A.
Kharchenko, V. A.

January 2009

The behavior of silicon wafers in the starting state (after both irradiation with nitrogen ions and ...

Effect of MeV Nitrogen Ion Implantation on the Resistivity Transition in Czochralski Silicon Wafers

?????????

December 2012

We investigated how MeV nitrogen ion implantation affects the resistivity transition in Czochralski ...

Nanometer-sized carbon coatings on a silicon wafer: the effect that nitrogen doping level has on specific conductivity and morphology

Kolpakov, A. Ya.
Sudzhanskaya, I. V.
Galkina, M. E.
Goncharov, I. Yu.
Poplavskii, A. I.
Manokhin, S. S.

January 2011

The dependences that the specific conductivity has on nitrogen pressure and thickness show nonlinear...

Nanometer-sized carbon coatings on a silicon wafer: the effect that nitrogen doping level has on specific conductivity and morphology

Kolpakov, A. Ya.
Sudzhanskaya, I. V.
Galkina, M. E.
Goncharov, I. Yu.
Poplavskii, A. I.
Manokhin, S. S.

February 2020

yesThe dependences that the specific conductivity has on nitrogen pressure and thickness show nonlin...

Structural and optical properties of silicon nitride film generated on Si substrate by low energy ion implantation

D. Dorranian
P. Azadfar
A. H. Sari
S. Ghorbani
A. Hojabri
M. Ghoranneviss

March 2008

In this work the surface of (4 0 0) p-type Si wafers is bombarded with 29 keV nitrogen ions at vario...

Structural and optical properties of silicon nitride film generated on Si substrate by low energy ion implantation

D. Dorranian
P. Azadfar
A. H. Sari
S. Ghorbani
A. Hojabri
M. Ghoranneviss

March 2008

In this work the surface of (4 0 0) p-type Si wafers is bombarded with 29 keV nitrogen ions at vario...

Nanohardness and contact angle of Si wafers implanted with N and C and Al alloy with N by plasma ion implantation

Ueda, M.
Lepienski, C. M.
Rangel, E. C.
Cruz, N. C.
Dias, F. G.

July 2002

Surfaces of silicon wafers implanted with N and C, respectively, and aluminum 5052 implanted with N ...

Nitrided Silicon-Carbon Coatings Structure and Properties

Rudenkov, A. S.
Rogachev, A. V.
Zavadski, S. M.
Golosov, D. A.
Luchnikov, P. A.
Dalskaya, G. Yu.
Vtoruchina, A. N.
Завадский, С. М.
Голосов, Д. А.

January 2020

The paper considers structural and physicomechanical properties of silicon-carbon coatings deposited...

Chemical modification and the attending surface hardness of low alloy steel through medium energy nitrogen ion implantation

Olofinjana, Ayodele
Tesfamichael, T
Bell, J M

January 2005

A surface hardenable low alloy carbon steel was implanted with medium energy (20-50 KeV) N2 + ions t...

Effect of internal stress on the surface morphology of hard nanoscale carbon coatings

Kolpakov, A. Y.
Galkina, M. E.
Goncharov, I. Yu.
Sudzhanskaya, I. V.
Poplavskii, A. I.

January 2008

The influence of ion energy on the magnitude of internal stress, electric conductivity, and surface ...

Effect of internal stress on the surface morphology of hard nanoscale carbon coatings

Kolpakov, A. Y.
Galkina, M. E.
Goncharov, I. Yu.
Sudzhanskaya, I. V.
Poplavskii, A. I.

February 2020

yesThe influence of ion energy on the magnitude of internal stress, electric conductivity, and surfa...

Radiation hardness improvement of separation-by-implantation-of-oxygen/silicon-on-insulator material by nitrogen ion implantation

Zhang EX
Sun JY
Chen J
Zhang ZX
Wang X
Li N
Zhang GQ
Liu ZL
Zhang, EX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China. 电子邮箱地址: yqfzhexia@163.com

January 2005

In our work, nitrogen ions were implanted into separation-by-implantation-of-oxygen (SIMOX) wafers t...

Formation of buried high-resitant layers in silicon by two-step substoichiometric implantation of nitrogen IONS

Kamyshan, A. S.
Solov’yev, V. S.
Rusetsky, A. M.

January 1999

The implantation of nitrogen at an elevated temperature with a dose of (2,5-4)T016 ions/cm2 at 200 k...

Formation of buried high-resitant layers in silicon by two-step substoichiometric implantation of nitrogen IONS

Kamyshan, A. S.
Solov’yev, V. S.
Rusetsky, A. M.

January 1999

The implantation of nitrogen at an elevated temperature with a dose of (2,5-4)T016 ions/cm2 at 200 k...

ELSEVIER Bum Interactions with Yatarials 8 Atoms Enhanced surface hardness in nitrogen-implanted silicon carbide

C. Uslu A
D. H. Lee A
Y. Berta A
B. Park A
D. B. Poker B
L. Riester B

January 2016

Preliminary studies have been performed on the feasibility of carbon-silicon nitride formation Q3-Si...

The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon

Kolpakov, A. Ya.
Druchinina, O. A.
Kharchenko, V. A.

January 2009

The behavior of silicon wafers in the starting state (after both irradiation with nitrogen ions and ...

Effect of MeV Nitrogen Ion Implantation on the Resistivity Transition in Czochralski Silicon Wafers

?????????

December 2012

We investigated how MeV nitrogen ion implantation affects the resistivity transition in Czochralski ...

Nanometer-sized carbon coatings on a silicon wafer: the effect that nitrogen doping level has on specific conductivity and morphology

Kolpakov, A. Ya.
Sudzhanskaya, I. V.
Galkina, M. E.
Goncharov, I. Yu.
Poplavskii, A. I.
Manokhin, S. S.

January 2011

The dependences that the specific conductivity has on nitrogen pressure and thickness show nonlinear...

Nanometer-sized carbon coatings on a silicon wafer: the effect that nitrogen doping level has on specific conductivity and morphology

Kolpakov, A. Ya.
Sudzhanskaya, I. V.
Galkina, M. E.
Goncharov, I. Yu.
Poplavskii, A. I.
Manokhin, S. S.

February 2020

yesThe dependences that the specific conductivity has on nitrogen pressure and thickness show nonlin...

Structural and optical properties of silicon nitride film generated on Si substrate by low energy ion implantation

D. Dorranian
P. Azadfar
A. H. Sari
S. Ghorbani
A. Hojabri
M. Ghoranneviss

March 2008

In this work the surface of (4 0 0) p-type Si wafers is bombarded with 29 keV nitrogen ions at vario...

Structural and optical properties of silicon nitride film generated on Si substrate by low energy ion implantation

D. Dorranian
P. Azadfar
A. H. Sari
S. Ghorbani
A. Hojabri
M. Ghoranneviss

March 2008

In this work the surface of (4 0 0) p-type Si wafers is bombarded with 29 keV nitrogen ions at vario...

Nanohardness and contact angle of Si wafers implanted with N and C and Al alloy with N by plasma ion implantation

Ueda, M.
Lepienski, C. M.
Rangel, E. C.
Cruz, N. C.
Dias, F. G.

July 2002

Surfaces of silicon wafers implanted with N and C, respectively, and aluminum 5052 implanted with N ...

Nitrided Silicon-Carbon Coatings Structure and Properties

Rudenkov, A. S.
Rogachev, A. V.
Zavadski, S. M.
Golosov, D. A.
Luchnikov, P. A.
Dalskaya, G. Yu.
Vtoruchina, A. N.
Завадский, С. М.
Голосов, Д. А.

January 2020

The paper considers structural and physicomechanical properties of silicon-carbon coatings deposited...

Chemical modification and the attending surface hardness of low alloy steel through medium energy nitrogen ion implantation

Olofinjana, Ayodele
Tesfamichael, T
Bell, J M

January 2005

A surface hardenable low alloy carbon steel was implanted with medium energy (20-50 KeV) N2 + ions t...

Effect of internal stress on the surface morphology of hard nanoscale carbon coatings

Kolpakov, A. Y.
Galkina, M. E.
Goncharov, I. Yu.
Sudzhanskaya, I. V.
Poplavskii, A. I.

January 2008

The influence of ion energy on the magnitude of internal stress, electric conductivity, and surface ...

Effect of internal stress on the surface morphology of hard nanoscale carbon coatings

Kolpakov, A. Y.
Galkina, M. E.
Goncharov, I. Yu.
Sudzhanskaya, I. V.
Poplavskii, A. I.

February 2020

yesThe influence of ion energy on the magnitude of internal stress, electric conductivity, and surfa...

Radiation hardness improvement of separation-by-implantation-of-oxygen/silicon-on-insulator material by nitrogen ion implantation

Zhang EX
Sun JY
Chen J
Zhang ZX
Wang X
Li N
Zhang GQ
Liu ZL
Zhang, EX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China. 电子邮箱地址: yqfzhexia@163.com

January 2005

In our work, nitrogen ions were implanted into separation-by-implantation-of-oxygen (SIMOX) wafers t...

Formation of buried high-resitant layers in silicon by two-step substoichiometric implantation of nitrogen IONS

Kamyshan, A. S.
Solov’yev, V. S.
Rusetsky, A. M.

January 1999

The implantation of nitrogen at an elevated temperature with a dose of (2,5-4)T016 ions/cm2 at 200 k...

Formation of buried high-resitant layers in silicon by two-step substoichiometric implantation of nitrogen IONS

Kamyshan, A. S.
Solov’yev, V. S.
Rusetsky, A. M.

January 1999

The implantation of nitrogen at an elevated temperature with a dose of (2,5-4)T016 ions/cm2 at 200 k...

ELSEVIER Bum Interactions with Yatarials 8 Atoms Enhanced surface hardness in nitrogen-implanted silicon carbide

C. Uslu A
D. H. Lee A
Y. Berta A
B. Park A
D. B. Poker B
L. Riester B

January 2016

Preliminary studies have been performed on the feasibility of carbon-silicon nitride formation Q3-Si...

The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon

Abstract

Extracted data

The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon

Abstract

Extracted data

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