Effect of internal stress on the surface morphology of hard nanoscale carbon coatings

Change of internal stress of carbon superhard condensates at a process of annealing

Inkin V. N.
Kolpakov A. Y.
Oukhanov S. I.
Barbakov V. I.
Galkina M. E.

February 2020

yesSuperhard carbon coatings with thickness from 5 nm up to 10 mm were obtained by vacuum-arc deposi...

Energetic deposition of carbon in a cathodic vacuum arc with a biased mesh

Lau, D
Sadek, A
Partridge, J
McKenzie, D
McCulloch, D

January 2011

Carbon films were deposited in a filtered cathodic vacuum arc with a bias potential applied to a con...

Temperature Dependent Variations of Properties of Polymer-Like Carbon Coatings Treated with High Energy Electrons

D. Adliene ̇

August 2016

Polymer-like carbon coatings can be used for the protection of micro-electromechanical devices funct...

Effect of internal stress on the surface morphology of hard nanoscale carbon coatings

Kolpakov, A. Y.
Galkina, M. E.
Goncharov, I. Yu.
Sudzhanskaya, I. V.
Poplavskii, A. I.

February 2020

yesThe influence of ion energy on the magnitude of internal stress, electric conductivity, and surfa...

Properties of Nanoscale Carbon Coatings Obtained by the Pulsed Vacuum-Arc Method on Silicon

January 2013

The complex of properties including the structure, adhesive strength, internal stresses, tribologica...

Nanometer-sized carbon coatings on a silicon wafer: the effect that nitrogen doping level has on specific conductivity and morphology

Kolpakov, A. Ya.
Sudzhanskaya, I. V.
Galkina, M. E.
Goncharov, I. Yu.
Poplavskii, A. I.
Manokhin, S. S.

January 2011

The dependences that the specific conductivity has on nitrogen pressure and thickness show nonlinear...

Nanometer-sized carbon coatings on a silicon wafer: the effect that nitrogen doping level has on specific conductivity and morphology

Kolpakov, A. Ya.
Sudzhanskaya, I. V.
Galkina, M. E.
Goncharov, I. Yu.
Poplavskii, A. I.
Manokhin, S. S.

February 2020

yesThe dependences that the specific conductivity has on nitrogen pressure and thickness show nonlin...

Properties of Nanoscale Carbon Coatings Obtained by the Pulsed Vacuum-Arc Method on Silicon

Kolpakov, A.Y.
Poplavsky, A.I.
Galkina, M.E.
Kovaleva, M.G.
Sudzhanskaya, I.V.
Gerus, J.V.

January 2013

The complex of properties including the structure, adhesive strength, internal stresses, tribologica...

Influence of the angle of inclination of the plasma flow of carbon to the substrate on the electrical capacitance and morphology of the surface of carbon coatings

Sudzhanskaya, I. V.
Poplavsky, А. I.
Goncharov, I. Y.
Glukhov, O. V.

January 2017

Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spec...

Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings

Sudzhanskaya, I.V.
Poplavsky, А.I.
Goncharov, I.Y.
Glukhov, O.V.

January 2017

Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spe...

Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings

Sudzhanskaya, I.V.
Poplavsky, А.I.
Goncharov, I.Y.
Glukhov, O.V.

January 2017

Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spe...

Control of stress and microstructure in cathodic arc deposited films

Bilek, M
Tarrant, R
Mckenzie, D
Lim, S
McCulloch, D

January 2003

The almost fully ionized cathodic arc plasma is a versatile source for the deposition of thin films....

The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon

Kolpakov, A. Ya.
Druchinina, O. A.
Kharchenko, V. A.

January 2009

The behavior of silicon wafers in the starting state (after both irradiation with nitrogen ions and ...

The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon

Kolpakov, A. Ya.
Druchinina, O. A.
Kharchenko, V. A.

February 2020

yesThe behavior of silicon wafers in the starting state (after both irradiation with nitrogen ions a...

Properties of carbon coatings obtained by pulsed high power methods of vacuum-arc and magnetron sputtering

Poplavsky, A. I.
Kolpakov, A. Ya.
Galkina, M. E.
Kovaleva, M. G.
Mishunin, M. V.

February 2020

Investigation results of the structure, mechanical, tribological and adhesion characteristics of car...

Change of internal stress of carbon superhard condensates at a process of annealing

Inkin V. N.
Kolpakov A. Y.
Oukhanov S. I.
Barbakov V. I.
Galkina M. E.

February 2020

yesSuperhard carbon coatings with thickness from 5 nm up to 10 mm were obtained by vacuum-arc deposi...

Energetic deposition of carbon in a cathodic vacuum arc with a biased mesh

Lau, D
Sadek, A
Partridge, J
McKenzie, D
McCulloch, D

January 2011

Carbon films were deposited in a filtered cathodic vacuum arc with a bias potential applied to a con...

Temperature Dependent Variations of Properties of Polymer-Like Carbon Coatings Treated with High Energy Electrons

D. Adliene ̇

August 2016

Polymer-like carbon coatings can be used for the protection of micro-electromechanical devices funct...

Effect of internal stress on the surface morphology of hard nanoscale carbon coatings

Kolpakov, A. Y.
Galkina, M. E.
Goncharov, I. Yu.
Sudzhanskaya, I. V.
Poplavskii, A. I.

February 2020

yesThe influence of ion energy on the magnitude of internal stress, electric conductivity, and surfa...

Properties of Nanoscale Carbon Coatings Obtained by the Pulsed Vacuum-Arc Method on Silicon

January 2013

The complex of properties including the structure, adhesive strength, internal stresses, tribologica...

Nanometer-sized carbon coatings on a silicon wafer: the effect that nitrogen doping level has on specific conductivity and morphology

Kolpakov, A. Ya.
Sudzhanskaya, I. V.
Galkina, M. E.
Goncharov, I. Yu.
Poplavskii, A. I.
Manokhin, S. S.

January 2011

The dependences that the specific conductivity has on nitrogen pressure and thickness show nonlinear...

Nanometer-sized carbon coatings on a silicon wafer: the effect that nitrogen doping level has on specific conductivity and morphology

Kolpakov, A. Ya.
Sudzhanskaya, I. V.
Galkina, M. E.
Goncharov, I. Yu.
Poplavskii, A. I.
Manokhin, S. S.

February 2020

yesThe dependences that the specific conductivity has on nitrogen pressure and thickness show nonlin...

Properties of Nanoscale Carbon Coatings Obtained by the Pulsed Vacuum-Arc Method on Silicon

Kolpakov, A.Y.
Poplavsky, A.I.
Galkina, M.E.
Kovaleva, M.G.
Sudzhanskaya, I.V.
Gerus, J.V.

January 2013

The complex of properties including the structure, adhesive strength, internal stresses, tribologica...

Influence of the angle of inclination of the plasma flow of carbon to the substrate on the electrical capacitance and morphology of the surface of carbon coatings

Sudzhanskaya, I. V.
Poplavsky, А. I.
Goncharov, I. Y.
Glukhov, O. V.

January 2017

Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spec...

Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings

Sudzhanskaya, I.V.
Poplavsky, А.I.
Goncharov, I.Y.
Glukhov, O.V.

January 2017

Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spe...

Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings

Sudzhanskaya, I.V.
Poplavsky, А.I.
Goncharov, I.Y.
Glukhov, O.V.

January 2017

Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spe...

Control of stress and microstructure in cathodic arc deposited films

Bilek, M
Tarrant, R
Mckenzie, D
Lim, S
McCulloch, D

January 2003

The almost fully ionized cathodic arc plasma is a versatile source for the deposition of thin films....

The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon

Kolpakov, A. Ya.
Druchinina, O. A.
Kharchenko, V. A.

January 2009

The behavior of silicon wafers in the starting state (after both irradiation with nitrogen ions and ...

The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon

Kolpakov, A. Ya.
Druchinina, O. A.
Kharchenko, V. A.

February 2020

yesThe behavior of silicon wafers in the starting state (after both irradiation with nitrogen ions a...

Properties of carbon coatings obtained by pulsed high power methods of vacuum-arc and magnetron sputtering

Poplavsky, A. I.
Kolpakov, A. Ya.
Galkina, M. E.
Kovaleva, M. G.
Mishunin, M. V.

February 2020

Investigation results of the structure, mechanical, tribological and adhesion characteristics of car...

Change of internal stress of carbon superhard condensates at a process of annealing

Inkin V. N.
Kolpakov A. Y.
Oukhanov S. I.
Barbakov V. I.
Galkina M. E.

February 2020

yesSuperhard carbon coatings with thickness from 5 nm up to 10 mm were obtained by vacuum-arc deposi...

Energetic deposition of carbon in a cathodic vacuum arc with a biased mesh

Lau, D
Sadek, A
Partridge, J
McKenzie, D
McCulloch, D

January 2011

Carbon films were deposited in a filtered cathodic vacuum arc with a bias potential applied to a con...

Temperature Dependent Variations of Properties of Polymer-Like Carbon Coatings Treated with High Energy Electrons

D. Adliene ̇

August 2016

Polymer-like carbon coatings can be used for the protection of micro-electromechanical devices funct...

Effect of internal stress on the surface morphology of hard nanoscale carbon coatings

Abstract

Extracted data

Effect of internal stress on the surface morphology of hard nanoscale carbon coatings

Abstract

Extracted data

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