Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures
- Dufour, Isabelle
- Hernandez, Luis Iglesias
- Shanmugam, Priyadarshini
- Michaud, Jean-François
- Alquier, Daniel
- Certon, Dominique
- Manrique-Juarez, Maria Dolores
- Leichle, Thierry
- Mathieu, Fabrice
- Mazenq, Laurent
- Nicu, Liviu
DOIAbstract
International audiencePrinciples of gas detection using either resonant microcantilevers or CMUTs without sensitive coating are presented. The different principles which have been tested for hydrogen detection are based on the use of electrical measurements to estimate physical gas properties (mass density, viscosity, sound velocity)
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