Composite systems with metallic nanoparticles embedded in dielectrics present peculiar physical properties which are attractive in several application fields. In the case of transition elements, the magnetic properties of the metal clusters embedded in a dielectric matrix mainly depend on the particle size and structure. In this work, silica films containing cobalt atoms were synthesized by RF magnetron co-sputtering deposition technique, with cobalt concentration of a few atomic percent. X-ray diffraction and transmission electron microscopy showed the presence of hcp cobalt nanoclusters in the as-deposited sample with the highest cobalt concentration. After deposition, thermal treatments were performed to promote cobalt compounds or nanop...