DOIAbstract
Recently, several micro electro-mechanical systems (MEMS) such as a MEMS gyroscope have been developed by using micro manufacturing technologies Micro scale products, however, usually have a relatively large manufacturing uncertainty compared to normal macro scale products It is quite expensive to lower the variance of material properties as well as the geometric properties of a micro scale product The material and geometric uncertainties caused by a micro manufacturing process inevitably lead to the uncertainty of the product performance Therefore, to achieve a reliable design of a product, the performance uncertainty of the product, which is often expressed by the variance or the standard deviation, needs to be estimated m a reliable way ...
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