An Extended Model of a MEMS Gyroscope: Design and Identification

The thesis is aimed on measurement and modeling of MEMS gyroscopes based on input-output characteristics. The first part briefs the state of the art. The second part is dedicated to measurement methodology. Critical points and sources of uncertainty are discussed and evaluated using measurements or simulations. The last part shows key characteristics of MEMS gyroscopes based on the survey of a group of different sensor types. The results have revealed significant influence of supply voltage that causes bias drift of the gyroscope and bias drift of the internal temperature sensor. The error can be comparable to temperature drift; however, this effect is not addressed in the literature. The second observed effect is temperature dependency of angle random walk. In the last part, a general model of a MEMS gyroscope is rewritten to reflect observed effects. Moreover, the structure is selected to be easily extendable and the coefficients are expressed to allow a comparison of nominal parameters of different sensors