Front-back gate coupling effect on 1/f noise in ultra-thin Si film FDSOI MOSFETs

International audienceLow-frequency (LF) noise was studied on 28 nm CMOS technology FDSOI devices with ultra-thin silicon film (7 nm) and thin buried oxide (25 nm). The noise level was observed to be strongly dependent on the combination of the front and back gate biasing voltages. This was explained by the coupling effect of both Si/High-K dielectric and Si/SiO 2 interface noise sources (channel/front oxide and channel/buried oxide), in combination with the variation of the Remote Coulomb scattering coefficient α. From comparison of the experimental and simulation results, it is illustrated that the main reason of this dependence is the distance between the charge distribution centroid and the interfaces, which is also controlled by both front and back-gate bias voltages, and the way this distance affects the Remote Coulomb scattering coefficient α. A new LF noise model approach is suggested to include the impact of all these parameters, and also allows us to extract the oxide trap density values for both interfaces