Induced Changes in Surface Band Bending of n-type and p-type AlGaN by Oxidation and Wet Chemical Treatments

[[abstract]]The surface chemistry and electrical properties of p-type and n-type AlGaN surfaces were studied via x-ray photoelectron spectroscopy before and after oxidation and wet chemical treatments. Shifts in the surface Fermi level were measured with the change in onset of the valence-band spectra. Oxidation and HF and (NH4)2Sx treatments on p-type AlGaN (n-type AlGaN) led to an increase (the reduction) in the surface band bending due to more N vacancies and N vacancies being occupied by S (i.e., donorlike states) than Al vacancies and Ga vacancies (i.e., acceptorlike states) near the p-type AlGaN (n-type AlGaN) surface region. The changes in surface chemistry indicate that oxidation and wet chemical treatments alter the surface state density through the formation of more donorlike states