Accurate characterization of adhesion properties in microelectronic systems is challenging due to (1) the far-field load application that often falls outside the microscopic field of view, (2) the ultra-small loads associated with specimen deformation, and (3) the load-case and specimen dependent interface response. To overcome these challenges, a generic method based on Integrated Digital Image Correlation (IDIC) is proposed, which identifies cohesive zone model parameters (of an arbitrary model not intrinsic to the identification method), by correlating images of a delaSavemination process from a restricted field of view at the microscopic scale, whereby far-field loading data cannot be exploited.To quantify the effects of potential error...