Erbium doped nanocrystalline silicon thin films were produced by reactive magnetron r.f sputtering. Their structural and chemical properties were studied by micro-Raman, spectroscopic ellipsometry and Rutherford backscattering spectroscopy. Films with different crystalline fraction and crystallite size were deposited by changing the deposition parameters. The impact of the composition and structure of Erbium ions environment on the 1.5 μm photoluminescence is discussed.FCT - POCTI/CTM/39395/2001INTAS - 03/51-648
Abstract. We have produced and studied undoped and erbium-doped nanocrystalline silicon thin films i...
Abstract. Erbium doped nanocrystalline silicon (nc-Si:Er) thin films were produced by reactive magne...
In this contribution, we present a structural and photoluminescence (PL) analysis of Er-doped nanocr...
Erbium doped nanocrystalline silicon thin films were produced by reactive magnetron r.f. sputtering....
We have produced and studied erbium doped nanocrystalline silicon thin films with different oxygen a...
We have produced and studied undoped and erbium-doped nanocrystalline silicon thin films in order to...
Erbium doped micro- and nanocrystalline silicon thin films have been deposited by co-sputtering of E...
Nanocrystalline silicon thin films doped with erbium were produced by reactive magnetron RF sputteri...
Erbium-doped low-dimensional Si films with different microstructures were deposited by reactive magn...
Erbium doped nanocrystalline silicon (nc-Si:Er) thin films were produced by reactive magnetron rf sp...
Microcrystalline silicon thin films doped with erbium were produced by RF sputtering and their struc...
Nanocrystalline silicon thin films codoped with erbium, oxygen and hydrogen have been deposited by c...
In this contribution, we present a structural and photoluminescence (PL) analysis of Er-doped nanocr...
Erbium-doped low-dimensional Si films with different microstructures were grown by reactive magnetro...
Erbium doped micro- and nanocrystalline silicon thin films have been deposited by co-sputtering of E...
Abstract. We have produced and studied undoped and erbium-doped nanocrystalline silicon thin films i...
Abstract. Erbium doped nanocrystalline silicon (nc-Si:Er) thin films were produced by reactive magne...
In this contribution, we present a structural and photoluminescence (PL) analysis of Er-doped nanocr...
Erbium doped nanocrystalline silicon thin films were produced by reactive magnetron r.f. sputtering....
We have produced and studied erbium doped nanocrystalline silicon thin films with different oxygen a...
We have produced and studied undoped and erbium-doped nanocrystalline silicon thin films in order to...
Erbium doped micro- and nanocrystalline silicon thin films have been deposited by co-sputtering of E...
Nanocrystalline silicon thin films doped with erbium were produced by reactive magnetron RF sputteri...
Erbium-doped low-dimensional Si films with different microstructures were deposited by reactive magn...
Erbium doped nanocrystalline silicon (nc-Si:Er) thin films were produced by reactive magnetron rf sp...
Microcrystalline silicon thin films doped with erbium were produced by RF sputtering and their struc...
Nanocrystalline silicon thin films codoped with erbium, oxygen and hydrogen have been deposited by c...
In this contribution, we present a structural and photoluminescence (PL) analysis of Er-doped nanocr...
Erbium-doped low-dimensional Si films with different microstructures were grown by reactive magnetro...
Erbium doped micro- and nanocrystalline silicon thin films have been deposited by co-sputtering of E...
Abstract. We have produced and studied undoped and erbium-doped nanocrystalline silicon thin films i...
Abstract. Erbium doped nanocrystalline silicon (nc-Si:Er) thin films were produced by reactive magne...
In this contribution, we present a structural and photoluminescence (PL) analysis of Er-doped nanocr...