Abstract. Erbium doped nanocrystalline silicon (nc-Si:Er) thin films were produced by reactive magnetron rf sputtering and by Er ion implantation into chemical vapor deposited Si films. The structure and chemical composition of films obtained by the two approaches were studied by micro-Raman scattering, spectroscopic ellipsometry and Rutherford backscattering techniques. Variation of deposition parameters was used to deposit films with different crystalline fraction and crystallite size. Photoluminescence measurements revealed a correlation between film microstructure and the Er3+ photoluminescence efficiency
Erbium doped nanocrystalline silicon thin films were produced by reactive magnetron r.f. sputtering....
Partilhar documento na coleção da comunidade Laboratório Associado I3NIn the present work, erbium do...
Erbium-doped low-dimensional Si films with different microstructures were deposited by reactive magn...
Erbium doped nanocrystalline silicon (nc-Si:Er) thin films were produced by reactive magnetron rf sp...
Nanocrystalline silicon thin films doped with erbium were produced by reactive magnetron RF sputteri...
Abstract. We have produced and studied undoped and erbium-doped nanocrystalline silicon thin films i...
We have produced and studied undoped and erbium-doped nanocrystalline silicon thin films in order to...
In this contribution, we present a structural and photoluminescence (PL) analysis of Er-doped nanocr...
In this contribution, we present a structural and photoluminescence (PL) analysis of Er-doped nanocr...
Microcrystalline silicon thin films doped with erbium were produced by RF sputtering and their struc...
We have produced and studied erbium doped nanocrystalline silicon thin films with different oxygen a...
Erbium doped micro- and nanocrystalline silicon thin films have been deposited by co-sputtering of E...
In this contribution, we present a structural and photoluminescence (PL) analysis of Er-doped nanocr...
In this contribution we present the visible and near IR photoluminescence (PL) analysis of Er doped ...
Erbium doped nanocrystalline silicon thin films were produced by reactive magnetron r.f sputtering. ...
Erbium doped nanocrystalline silicon thin films were produced by reactive magnetron r.f. sputtering....
Partilhar documento na coleção da comunidade Laboratório Associado I3NIn the present work, erbium do...
Erbium-doped low-dimensional Si films with different microstructures were deposited by reactive magn...
Erbium doped nanocrystalline silicon (nc-Si:Er) thin films were produced by reactive magnetron rf sp...
Nanocrystalline silicon thin films doped with erbium were produced by reactive magnetron RF sputteri...
Abstract. We have produced and studied undoped and erbium-doped nanocrystalline silicon thin films i...
We have produced and studied undoped and erbium-doped nanocrystalline silicon thin films in order to...
In this contribution, we present a structural and photoluminescence (PL) analysis of Er-doped nanocr...
In this contribution, we present a structural and photoluminescence (PL) analysis of Er-doped nanocr...
Microcrystalline silicon thin films doped with erbium were produced by RF sputtering and their struc...
We have produced and studied erbium doped nanocrystalline silicon thin films with different oxygen a...
Erbium doped micro- and nanocrystalline silicon thin films have been deposited by co-sputtering of E...
In this contribution, we present a structural and photoluminescence (PL) analysis of Er-doped nanocr...
In this contribution we present the visible and near IR photoluminescence (PL) analysis of Er doped ...
Erbium doped nanocrystalline silicon thin films were produced by reactive magnetron r.f sputtering. ...
Erbium doped nanocrystalline silicon thin films were produced by reactive magnetron r.f. sputtering....
Partilhar documento na coleção da comunidade Laboratório Associado I3NIn the present work, erbium do...
Erbium-doped low-dimensional Si films with different microstructures were deposited by reactive magn...