Data showing effect of sampling area and resolution for BCP pattern metrics: LWR, LER, defect density, and correlation length.

<p>All images had areas of 1280 x 896 pixels, taken with different magnification factors. Five cylinder-forming PS-b-P2VP block copolymers, each identically treated, were imaged: PS(23.6k)-b-P2VP(10.4k) [blue circles], PS(32.5k)-b-P2VP(12k) [green triangles], PS(34k)-b-P2VP(18k) [yellow squares], PS(44k)-b-P2VP(18.5k) [orange pentagons], and PS(50k)-b-P2VP(16.5k) [red diamonds]. Average values are indicated by dark markers and standard deviation error bars; data from individual images are shown with light markers. A. Standard deviation for line-width (LWR, 1σ) divided by the line-width for various resolutions and plotted as a function of real image area, μm². B. Standard deviation for line edge position (LER, 1σ) divided by the line-width for various resolutions and plotted as a function of real image area, μm². C. Defect pair density as a function of real image area, μm². D. Correlation length measured as a function of real image area, μm²; see also <a href="http://www.plosone.org/article/info:doi/10.1371/journal.pone.0133088#pone.0133088.s010" target="_blank">S9 Fig</a>, which plots the correlation length as a function of the number of grains measured.