Data for each of the four panels in Fig 1, including period, LER, LWR, correlation length, and defect density.

<p>Units are in nm, except for defect density, which is given as defect pairs per μm². Line-edge roughness (LER) is given as three times the standard deviation (3σ) in the edge position, relative to the center of the line; line-width roughness (LWR) is three times the standard deviation (3σ) in the width of the line.</p><p>Data for each of the four panels in <a href="http://www.plosone.org/article/info:doi/10.1371/journal.pone.0133088#pone.0133088.g001" target="_blank">Fig 1</a>, including period, LER, LWR, correlation length, and defect density.