Ion beams in SEM: An experiment towards a high brightness low energy spread electron impact gas ion source
- Jun, D.S. (author)
- Kutchoukov, V.G. (author)
- Kruit, P. (author)
DOIAbstract
A next generation ion source suitable for both high resolution focused ion beam milling and imaging applications is currently being developed. The new ion source relies on a method of which positively charged ions are extracted from a miniaturized gas chamber where neutral gas atoms become ionized by direct electron impact. The use of a very small gas chamber and a very narrow electron beam (<100 nm) allows for a very small ionization volume, which, in turn, yields a small virtual source size and low energy spread. The authors estimate that using a high current density electron beam from a Schottky electron gun the reduced brightness of this source can exceed that of the Gallium Liquid Metal Ion Sources and the energy spread can be well bel...
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