Theoretical Calculation of Electron Energy Distribution Function in Crossed E×B Fields in Low-Pressure Argon Plasma1

Abstract – In this paper theoretical model and re-sults of analytical calculations of electron energy distribution function (EEFD) for low-pressure ar-gon plasma are presented. In model only elastic collisions that define spectrum of electrons in crossed E×B fields were taken into account. To describe ionization process in plasma we used model approximation. In this approximation the influence of ionization on EEFD in its “tail ” was taken into account. The following cases are consid-ered: absence of magnetic field, strong magnetic field and intermediate case. It is shown that at ab-sence of magnetic field the EEFD strongly differs from Maxwellian. In case of a strong magnetic field the electron energy distribution function has dis-tribution close to Maxwellian. Estimations of floating potential of discharge system electrodes in argon plasma in crossed E×B fields with taking into account of non-Maxwellian shape of EEFD are also presented. These calculations were performed to describe low-temperature plasma produced in plasma source based on low-pressure arc discharge with a hollow cold cathode. 1