Probing the electron energy distribution function (EEDF) of ionizing plasmas

Strong deviations from Maxwellian equilibrium of the electron energy distribution function (EEDF) are very often encountered in (relatively) high pressure, non-equilibrium plasmas. The shape of the EEDF will strong affect all electron induced excitation processes and consequently excited species net effluxes. In this contribution, we will present an experimental investigation of the EEDF of an intermediate pressure (argon) microwave plasma by a combination of experimental and modelling techniques