A CLEANING FACILITY TO PREPARE PARTICLE FREE UHV- COMPONENTS

To prepare UHV components both hydrocarbon and particle free a new cleaning facility has been installed at DESY/Hamburg. Both requirements are important for accelerators using superconducting accelerating structures of high gradients as well as for synchrotron radiation beamlines connected to an accelerator using optical components like mirrors for the photon beam transport. The cleaning facility is located inside a clean room which fulfils class 10.000 and partly class 100 specification†. Following standard UHV-cleaning the final cleaning process consists of a fine degreasing of the components in an ultrasonic bath and rinsing with ultra pure water‡. Thereafter the components are dried using up to 110º C hot filtered air or nitrogen gas according to clean room class 100 requirements. Vacuum chambers of up to 4.8 m length can be handled. Small components are cleaned using a lab washer, which is loaded from outside the clean room. A small assembly area equipped with an oil free pump station, leak detector and residual gas analyser completes the facility