Structure Effect on the Response of ZnGa<sub>2</sub>O<sub>4</sub> Gas Sensor for Nitric Oxide Applications

  • Ray-Hua Horng
  • Shu-Hsien Lin
  • Dun-Ru Hung
  • Po-Hsiang Chao
  • Pin-Kuei Fu
  • Cheng-Hsu Chen
  • Yi-Che Chen
  • Jhih-Hong Shao
  • Chiung-Yi Huang
  • Fu-Gow Tarntair
  • Po-Liang Liu
  • Ching-Lien Hsiao
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Publication date
October 2022
Publisher
MDPI AG
Journal
Nanomaterials

Abstract

We fabricated a gas sensor with a wide-bandgap ZnGa2O4 (ZGO) epilayer grown on a sapphire substrate by metalorganic chemical vapor deposition. The ZGO presented (111), (222) and (333) phases demonstrated by an X-ray diffraction system. The related material characteristics were also measured by scanning electron microscopy, transmission electron microscopy and X-ray photoelectron spectroscopy. This ZGO gas sensor was used to detect nitric oxide (NO) in the parts-per-billion range. In this study, the structure effect on the response of the NO gas sensor was studied by altering the sensor dimensions. Two approaches were adopted to prove the dimension effect on the sensing mechanism. In the first approach, the sensing area of the sensors was ke...

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