A solution for in-situ spatially resolved intensity measurements in belt furnaces

  • Herguth, Axel
  • Graf, Alexander
  • Hahn, Giso
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Publication date
January 2019

Abstract

An intensity tracker has been developed which can be sent through belt furnaces used for thermal treatments that rely on illumination for heating and/or excess charge carrier generation. The device allows for spatially resolved measurements of illumination profiles and can be used to optimize and monitor illumination intensity within the furnaces. The crucial design aspects such as thermal management and the impact of sensor element size on sensitivity are discussed.publishe

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