Derived Boundary Conditions for Viscous Thermal Oxidation Equations in Pressure Potential Form

  • S. Mijalkovic
  • W. Joppich
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Publication date
November 2007

Abstract

Boundary conditions for viscous flow thermal oxidation equations in pressure potential form are derived in a way which is physically consistent and also convenient for practical implementation. A role of the incompressibility constraint on oxide boundary is emphasised. A possibility to employ the standard piecewise linear finite element or finite volume discretization schemes is justified. Importance and correctness of the derived boundary conditions are practically demonstrated in the simulation of the standard LOCOS process

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