The LIS3L02AS4 is a low-power three axes linear accelerometer that includes a sensing element and an IC interface able to take the information from the sensing element and to provide an analog signal to the external world. The sensing element, capable of detecting the acceleration, is manufactured using a dedicated process developed by ST to produce inertial sensors and actuators in silicon. The IC interface is manufactured using a standard CMOS process that allows high level of integration to design a dedicated circuit which is trimmed to better match the sensing element characteristics. The LIS3L02AS4 has a user selectable full scale o
The paper demonstrates the very first CMOS integrated monolithic MEMS (Micro Electro Mechanical Syst...
The exponential growth in demand for compact and efficient accelerometers is driven by their diverse...
Abstract: Micro-electromechanical systems (MEMS) are free scale’s enabling technology for accelerati...
SIGLEAvailable from British Library Document Supply Centre-DSC:DXN025385 / BLDSC - British Library D...
A three-axis capacitive accelerometer has been developed using silicon-direct-bonding SOI wafer. Z-a...
IEEE International Conference on Automation and LogisticsThis article presents a new low-cost PCB-ba...
A CMOS interface for three-axis capacitive accelerometers is presented. The circuit implements an in...
This paper presents a monolithic three-axis accelerometer with wafer-level package by CMOS MEMS proc...
This paper presents research at The University of Michigan on micromachined accelerometers and their...
This dissertation presents the conception and the implementation of an 'intelligent' triaxial accele...
fabricated using an in-house 100 µm SOI process. Arrows show sensitivity to acceleration and tempera...
This paper presents a new kind of laterally capacity sensed accelerometer fabricated with silicon/gl...
key Words: gyroscope, accelerometer, MEMS, inertial sensor, piezo Recently, inertial sensors are pop...
To verify the effectiveness of a higher order electromechanical sigma-delta modulator (ΣΔM), a micro...
A new technology for fabricating laterally capacity sensed accelerometers is presented. This technol...
The paper demonstrates the very first CMOS integrated monolithic MEMS (Micro Electro Mechanical Syst...
The exponential growth in demand for compact and efficient accelerometers is driven by their diverse...
Abstract: Micro-electromechanical systems (MEMS) are free scale’s enabling technology for accelerati...
SIGLEAvailable from British Library Document Supply Centre-DSC:DXN025385 / BLDSC - British Library D...
A three-axis capacitive accelerometer has been developed using silicon-direct-bonding SOI wafer. Z-a...
IEEE International Conference on Automation and LogisticsThis article presents a new low-cost PCB-ba...
A CMOS interface for three-axis capacitive accelerometers is presented. The circuit implements an in...
This paper presents a monolithic three-axis accelerometer with wafer-level package by CMOS MEMS proc...
This paper presents research at The University of Michigan on micromachined accelerometers and their...
This dissertation presents the conception and the implementation of an 'intelligent' triaxial accele...
fabricated using an in-house 100 µm SOI process. Arrows show sensitivity to acceleration and tempera...
This paper presents a new kind of laterally capacity sensed accelerometer fabricated with silicon/gl...
key Words: gyroscope, accelerometer, MEMS, inertial sensor, piezo Recently, inertial sensors are pop...
To verify the effectiveness of a higher order electromechanical sigma-delta modulator (ΣΔM), a micro...
A new technology for fabricating laterally capacity sensed accelerometers is presented. This technol...
The paper demonstrates the very first CMOS integrated monolithic MEMS (Micro Electro Mechanical Syst...
The exponential growth in demand for compact and efficient accelerometers is driven by their diverse...
Abstract: Micro-electromechanical systems (MEMS) are free scale’s enabling technology for accelerati...