Optical imaging is traditionally carried out using circular pupils, assuring the absence of orientation dependency. In the case of IC microlithography however, such dependency exists and is generally limited to orthogonal axes. We have previously reported the potential improvement to lithographic imaging through the use of a square character to an illumination pupil using fully open pupils, square rings, and slot shapes. In this paper we show lithographic results for this shaping at 193nm using a full field (ASML) imaging tool. Results show improvement in both DOF and exposure latitude over conventional circular shaping, leading to the consideration of this approach as a manufacturable method of resolution enhancement
Mask topography effects need to be taken into consideration for more advanced resolution enhancement...
Photographic imaging methods allow the tracking of anatomical changes in the iridocorneal angle stru...
Industrial demands for integrated circuits of higher speed and complexity have required the developm...
As semiconductor optical lithography is pushed to smaller dimensions, resolution enhancement techniq...
For applications in optical systems it is often necessary to represent a circular aperture in a pixe...
Off axis illumination (OAI) is one of the key resolution enhancement technologies in projection lith...
As device sizes reduce in size and processes become more complex, enhancement techniques for optical...
Polychromatic MTFs based on the work of Hopkins and Sayanagi are developed for a pinhole camera usin...
It is well known that, in most eyes, astigmatism increases with the field angle. A simple reduced-ey...
The foundation of semiconductor industry has historically been driven by scaling. Device size reduct...
All articles in this issue are also free to read on the journal website. Purpose: Changes in pupil s...
In this manuscript an exact solution to the inverse problem of axial beam shaping along the focus of...
Off-axis illumination is a promising optical microlithography technique which can be used to improve...
The ability to shape a focus of light would improve many fields of study, including microscopy and o...
Abstract. Purpose: Investigations of foveal aberrations assume circular pupils. However, the pupil b...
Mask topography effects need to be taken into consideration for more advanced resolution enhancement...
Photographic imaging methods allow the tracking of anatomical changes in the iridocorneal angle stru...
Industrial demands for integrated circuits of higher speed and complexity have required the developm...
As semiconductor optical lithography is pushed to smaller dimensions, resolution enhancement techniq...
For applications in optical systems it is often necessary to represent a circular aperture in a pixe...
Off axis illumination (OAI) is one of the key resolution enhancement technologies in projection lith...
As device sizes reduce in size and processes become more complex, enhancement techniques for optical...
Polychromatic MTFs based on the work of Hopkins and Sayanagi are developed for a pinhole camera usin...
It is well known that, in most eyes, astigmatism increases with the field angle. A simple reduced-ey...
The foundation of semiconductor industry has historically been driven by scaling. Device size reduct...
All articles in this issue are also free to read on the journal website. Purpose: Changes in pupil s...
In this manuscript an exact solution to the inverse problem of axial beam shaping along the focus of...
Off-axis illumination is a promising optical microlithography technique which can be used to improve...
The ability to shape a focus of light would improve many fields of study, including microscopy and o...
Abstract. Purpose: Investigations of foveal aberrations assume circular pupils. However, the pupil b...
Mask topography effects need to be taken into consideration for more advanced resolution enhancement...
Photographic imaging methods allow the tracking of anatomical changes in the iridocorneal angle stru...
Industrial demands for integrated circuits of higher speed and complexity have required the developm...