The Design and Realization of Depletion Mode MOSFET Devices

  • Wei-han Jeng
  • Kanchanadet Banchusuwan
  • Jeffrey S. Dudas
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Publication date
January 2005

Abstract

Our study involves the design, fabrication, and characterization of the basic depletion mode MOSFET devices on four-inch silicon wafers. The results of our study will include discussions of the following: 1) basic semiconductor device design and processing procedures using our laboratory facilities within the Department of Electrical and Computer Engineering at the Virginia Military Institute; 2) depletion MOSFET (D-MOS) technology, including device structure, design layout, fabrication procedures, and device characteristics (I-V and transfer characteristics); 3) the effect of different doping procedures on the performance characteristics of the D-MOS device; and 4) an evaluation of the performance characteristics of the D-MOS transistors t...

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