Ionization methods of vacuum measurement

The Diploma thesis concerns with problems of measurement pressure of vacuum systems, with pressure lower than 10-6 Pa. Although most of the basic constructions of vacuum gauge for these levels of pressure was developed in the beginning of 1960s, the new constructions and modifications are still appearing. Ionization vacuum gauge 3BG (Bent Belt-Beam gauge) is one of them. Predisposition of 3BG for measurement of pressure lower than 10-6 Pa is verified by means of experimental verifying of characteristics of the brand new construction of vacuum gauge 3BG and by theoretical description of behaviour of the electrons in geometry 3BG, using computer simulation. Experimental specification of the most favourable parameters for operation of vacuum gauge 3BG is used for reaching maximal sensitivity with the cathode load at the lowest possible level. Powered by TCPDF (www.tcpdf.org