Calibration of Talysurf CCI coherence scanning interferometer

This master’s thesis deals with calibration of a coherence scanning interferometer Talysurf CCI Lite. Basic terms related to surface texture evaluation were described along with selected profile and areal surface texture parameters. The working principle and design of the calibrated instrument were explained. Manufacturer’s calibration procedure was analyzed in relation to the definition of calibration in the International vocabulary of metrology. Further calibration steps leading to calculation of measurement uncertainty were presented. Last but not least, measurement uncertainties of areal surface texture parameters Sq and Sz were evaluated. The procedures and results described in this thesis may contribute to wider use of non-contact surface texture measuring instruments