Prototype of calorimetric flow microsensor

An analytical model of calorimetric flow sensor has been developed. The results of the application of this model are utilized to develop a calorimetric flow microsensor with optimal functional characteristics. The technology to manufacture the microsensor is described. A prototype of the microsensor suitable to be used in the mass air flow meter has been designed. The basic characteristics of the microsensor are presented. © 2012 American Institute of Physics