Air-coupled PMUT at 100 kHz with PZT active layer and residual stresses: Multiphysics model and experimental validation
- MASSIMINO, GIANLUCA
- D'ALESSANDRO, LUCA
- ARDITO, RAFFAELE
- CORIGLIANO, ALBERTO
- Procopio, F.
- Ferrera, M.
Publication date
January 2017
DOI Publisher
Institute of Electrical and Electronics Engineers Inc. Citation count (estimate)
1Abstract
In this paper a complete Multiphysics modelling via the Finite Element Method (FEM) of an air-coupled Piezoelectric Micromachined Ultrasonic Transducer (PMUT) is described, with its experimental validation related to the mechanical and acoustic responses
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