A review on the state of the art of silicon oxynitride deposition at the MESA Research Institute will be given. The recent progress in the application of silicon oxynitride in communication devices will be discusse
In this study, the authors deposited silicon oxynitride films by Radio Frequency Plasma Enhanced Che...
Within the last decade, chemical vapor deposition (CVD)-grown silicon oxynitride (SiOxNy) thin films...
The development of integrated quantum photonics is integral to many areas of quantum information sci...
< meas limit 1.527p 6.1 < meas. limit 1.3 Abstract- A review on the state of the art of silico...
Silicon oxynitride is a very attractive material for integrated optics application, because of its e...
This work explores the microfabrication technology for realizing miniature waveguide structure for o...
This work explores the technology for preparing low hydrogen-content silicon oxynitride film for int...
Silicon oxynitride is a very attractive material for integrated optics. Besides possessing excellent...
This work reports a method for reducing hydrogen content in silicon oxynitride film for integrated o...
A study is presented on silicon oxynitride material for waveguides and germanium-silicon alloys for ...
Thick oxynitride films were prepared by plasma enhanced chemical vapor deposition (PECVD) with N<sub...
Silicon Oxynitride layers are grown from SiH4/N2, NH3 and N2O by Plasma Enhanced Chemical Vapor Depo...
The growth of silicon oxynitride thin films applying remote inductively coupled, plasma-enhanced che...
Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide r...
Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated b...
In this study, the authors deposited silicon oxynitride films by Radio Frequency Plasma Enhanced Che...
Within the last decade, chemical vapor deposition (CVD)-grown silicon oxynitride (SiOxNy) thin films...
The development of integrated quantum photonics is integral to many areas of quantum information sci...
< meas limit 1.527p 6.1 < meas. limit 1.3 Abstract- A review on the state of the art of silico...
Silicon oxynitride is a very attractive material for integrated optics application, because of its e...
This work explores the microfabrication technology for realizing miniature waveguide structure for o...
This work explores the technology for preparing low hydrogen-content silicon oxynitride film for int...
Silicon oxynitride is a very attractive material for integrated optics. Besides possessing excellent...
This work reports a method for reducing hydrogen content in silicon oxynitride film for integrated o...
A study is presented on silicon oxynitride material for waveguides and germanium-silicon alloys for ...
Thick oxynitride films were prepared by plasma enhanced chemical vapor deposition (PECVD) with N<sub...
Silicon Oxynitride layers are grown from SiH4/N2, NH3 and N2O by Plasma Enhanced Chemical Vapor Depo...
The growth of silicon oxynitride thin films applying remote inductively coupled, plasma-enhanced che...
Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide r...
Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated b...
In this study, the authors deposited silicon oxynitride films by Radio Frequency Plasma Enhanced Che...
Within the last decade, chemical vapor deposition (CVD)-grown silicon oxynitride (SiOxNy) thin films...
The development of integrated quantum photonics is integral to many areas of quantum information sci...
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