SU-8 micro Coriolis mass flow sensor

Abstract This work presents the modelling, design, fabrication and test of the first micro Coriolis mass flow sensor fully fabricated in SU-8 by photolithography processes. The sensor consists of a channel with rectangular cross-section with inner opening of 100 μm × 100 μm and is actuated at resonance by Lorentz forces. Metal tracks for the actuation current are deposited on top of the chip. The chip has been tested over a flow range of 0–800 mg/min in the case of water and 0–650 mg/min for isopropyl alcohol (IPA) to confirm that the sensor measures true mass flow (at the maximum flow of the tested range, 0–800 μl/min for both water and IPA, it results in a pressure drop of 0.98 bar for water and 1.97 bar for IPA)