We introduce a new way to micromachine \lbrace111\rbrace oriented plates on \lbrace001\rbrace silicon wafers by anisotropic wet chemical etching. The process involves double-sided wafer-processing. Precision alignment, however, is only required at one side
Wet anisotropic etching based silicon micromachining is an important technique to fabricate freestan...
The effects of wet anisotropic etching of [100] silicon were studied with mask edges aligned at 45/s...
The planes occurring at convex corners during anisotropic etching of (100)-silicon in aqueous KOH we...
We introduce a new way to micromachine \lbrace111\rbrace oriented plates on \lbrace001\rbrace silico...
New methodologies in anisotropic wet-chemical etching of oriented silicon allowing useful process de...
Abstract—New methodologies in anisotropic wet-chemical etching of 111-oriented silicon, allowing use...
New methodologies in anisotropic wet-chemical etching of -oriented silicon, allowing useful process ...
New methodologies in anisotropic wet-chemical etching of oriented silicon allowing useful process de...
Silicon wet anisotropic etching based bulk micromachining technique is widely used for the fabricati...
The paper presents investigation of micromechanical technique using 3D anisotropically etched Si str...
In the silicon wet anisotropic etching, which is usually performed in alkaline solutions (e.g. potas...
In wet bulk micromachining, the etching characteristics are orientation dependent. As a result, prol...
In this work, we have developed a novel anisotropic wet etching process for the fabrication of MEMS ...
Silicon micromachining (1), the generation of three-dimensional microstructures in silicon by planar...
This paper deals with the anisotropic chemical etching of various silicon plates etched in EDP. Chan...
Wet anisotropic etching based silicon micromachining is an important technique to fabricate freestan...
The effects of wet anisotropic etching of [100] silicon were studied with mask edges aligned at 45/s...
The planes occurring at convex corners during anisotropic etching of (100)-silicon in aqueous KOH we...
We introduce a new way to micromachine \lbrace111\rbrace oriented plates on \lbrace001\rbrace silico...
New methodologies in anisotropic wet-chemical etching of oriented silicon allowing useful process de...
Abstract—New methodologies in anisotropic wet-chemical etching of 111-oriented silicon, allowing use...
New methodologies in anisotropic wet-chemical etching of -oriented silicon, allowing useful process ...
New methodologies in anisotropic wet-chemical etching of oriented silicon allowing useful process de...
Silicon wet anisotropic etching based bulk micromachining technique is widely used for the fabricati...
The paper presents investigation of micromechanical technique using 3D anisotropically etched Si str...
In the silicon wet anisotropic etching, which is usually performed in alkaline solutions (e.g. potas...
In wet bulk micromachining, the etching characteristics are orientation dependent. As a result, prol...
In this work, we have developed a novel anisotropic wet etching process for the fabrication of MEMS ...
Silicon micromachining (1), the generation of three-dimensional microstructures in silicon by planar...
This paper deals with the anisotropic chemical etching of various silicon plates etched in EDP. Chan...
Wet anisotropic etching based silicon micromachining is an important technique to fabricate freestan...
The effects of wet anisotropic etching of [100] silicon were studied with mask edges aligned at 45/s...
The planes occurring at convex corners during anisotropic etching of (100)-silicon in aqueous KOH we...
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