Miniature Nernstian oxygen sensor for deposition and growth environments
- van Setten, E.
- Gur, T.M.
- Blank, David H.A.
- Bravman, J.C.
- Beasley, M.R.
DOIAbstract
A miniature Nernstian-type oxygen sensor employing an ionically conducting stabilized zirconia solid electrolyte and an embedded internal reference electrode is developed and is tested in the temperature range 275–425 °C. It is intended for in situ monitoring of oxygen content in deposition and growth environments. Advantages of this sensor are in situ generation of the Ni/NiO two phase internal reference thin film electrode using a solid-state oxygen Coulometric titration technique, its small size (5 mm×10 mm), flat geometry (<1 mm thick), relatively low operating temperature, and the fact that the entire sensor can be immersed in the gaseous environment with the unknown oxygen content. The latter feature is distinctly different from comme...
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