It is shown experimentally that in laser interference lithography, by using a reference grating, respective grating layers can be positioned with high relative accuracy. A 0.001 angular and a few nanometers lateral resolution have been demonstrated
Large-sized gratings are essential optical elements in laser fusion and space astronomy facilities. ...
Large-sized gratings are essential optical elements in laser fusion and space astronomy facilities. ...
To produce large scale gratings by Scanning Beam Interference Lithography (SBIL), a light spot conta...
It is shown experimentally that in laser interference lithography, by using a reference grating, res...
Three dimensional photonic crystals, e.g. for obtaining the so-called woodpile structure, can, among...
Three dimensional photonic crystals, e.g. for obtaining the so-called woodpile structure, can, among...
Three dimensional photonic crystals, e.g. for obtaining the so-called woodpile structure, can, among...
In this chapter we explain how submicron gratings can be prepared by Laser Interference Lithography ...
In this chapter we explain how submicron gratings can be prepared by Laser Interference Lithography ...
Fabrication of two- and three-dimensional (2D and 3D) structures in the micro- and nano-range allows...
In this thesis, the theory, fabrication protocol, and initial results of an alternative nanopatterni...
Fabrication of nanoscale highly periodic structures is a vital capability for research on quasicryst...
Among the various contenders for VLSI lithography below 0.1 $\mu$m, proximity x-ray printing is the ...
In this paper, we will be initially doing review on the advancement of interference lithography (IL)...
In this paper, we will be initially doing review on the advancement of interference lithography (IL)...
Large-sized gratings are essential optical elements in laser fusion and space astronomy facilities. ...
Large-sized gratings are essential optical elements in laser fusion and space astronomy facilities. ...
To produce large scale gratings by Scanning Beam Interference Lithography (SBIL), a light spot conta...
It is shown experimentally that in laser interference lithography, by using a reference grating, res...
Three dimensional photonic crystals, e.g. for obtaining the so-called woodpile structure, can, among...
Three dimensional photonic crystals, e.g. for obtaining the so-called woodpile structure, can, among...
Three dimensional photonic crystals, e.g. for obtaining the so-called woodpile structure, can, among...
In this chapter we explain how submicron gratings can be prepared by Laser Interference Lithography ...
In this chapter we explain how submicron gratings can be prepared by Laser Interference Lithography ...
Fabrication of two- and three-dimensional (2D and 3D) structures in the micro- and nano-range allows...
In this thesis, the theory, fabrication protocol, and initial results of an alternative nanopatterni...
Fabrication of nanoscale highly periodic structures is a vital capability for research on quasicryst...
Among the various contenders for VLSI lithography below 0.1 $\mu$m, proximity x-ray printing is the ...
In this paper, we will be initially doing review on the advancement of interference lithography (IL)...
In this paper, we will be initially doing review on the advancement of interference lithography (IL)...
Large-sized gratings are essential optical elements in laser fusion and space astronomy facilities. ...
Large-sized gratings are essential optical elements in laser fusion and space astronomy facilities. ...
To produce large scale gratings by Scanning Beam Interference Lithography (SBIL), a light spot conta...
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