Transduction mechanisms and their applications in micromechanical devices
- Elwenspoek, M.
- Blom, F.R.
- Bouwstra, S.
- Lammerink, T.S.J.
- van de Pol, F.C.M.
- Tilmans, H.A.C.
- Popma, Th.J.A.
- Fluitman, J.H.J.
Publication date
January 1989
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discusse
Add to ORKG