A capacitive RF power sensor based on MEMS technology

Existing power sensors for RF signals are based on thermistors, diodes and thermocouples. These power sensors are used as terminating devices and therefore they dissipate the complete incoming signal. Furthermore, new telecommunication systems require low weight, volume and power consumption and a high level of integration with electronics. These requirements are expected to be fulfilled by RF MEMS devices. The design and fabrication of a power sensor for RF signals based on MEMS technology was the main objective of this thesis. The research was performed in the context of the European project EMMA (Electro Mechanical Microcomponents for precision Applications)