The concentration of dissolved material in an etch-hole is computed in order to construct a numerical simulation of wet-chemical etching. Using a number of assumptions an approximate convection-diffusion equation is formulated. In this way, analytical descriptions for the concentration in different parts of the domain are obtained. By a coupling of these descriptions the concentration can be computed. The result is validated by comparison with a finite-volume method. Results of the boundary-layer method are given for an etch-hole geometry
We developed a simulation tool for the three-dimensional orientation-dependent wet etching of silico...
This publication is devoted to the numerical implementation of the mathematical model on a microscop...
International audienceA numerical model is proposed to simulate the isotropic wet etching of silicon...
a wet-chemical etching process, the resulting etched shape is smaller than the originally designed s...
A method of computing the concentration field of dissolved material inside an etch-hole is presented...
A total-concentration fixed-grid method is presented to model the convection-driven wet chemical etc...
Abstract. A numerical model based on the total concentration of etchant is proposed to model the wet...
A total concentration fixed-grid method is presented in this paper to model the two-dimensional wet ...
In this paper we discuss the application of a space-time discontinuous Galerkin finite element metho...
The effect of fluid flow, transport, and reaction on the shape evolution of two-dimensional cavities...
Replacement of wet etch processes in microelectronics manufacturing requires the development of new ...
In this paper we discuss the application of a space-time discontinuous Galerkin finite element metho...
177 p.Chemical Etching (CE) is an important production process for the fabrication of electronic dev...
ABSTRACT This article presents a total concentration method for two-dimensional wet chemical etching...
Abstract. In this paper we discuss the application of a space-time discontinuous Galerkin nite eleme...
We developed a simulation tool for the three-dimensional orientation-dependent wet etching of silico...
This publication is devoted to the numerical implementation of the mathematical model on a microscop...
International audienceA numerical model is proposed to simulate the isotropic wet etching of silicon...
a wet-chemical etching process, the resulting etched shape is smaller than the originally designed s...
A method of computing the concentration field of dissolved material inside an etch-hole is presented...
A total-concentration fixed-grid method is presented to model the convection-driven wet chemical etc...
Abstract. A numerical model based on the total concentration of etchant is proposed to model the wet...
A total concentration fixed-grid method is presented in this paper to model the two-dimensional wet ...
In this paper we discuss the application of a space-time discontinuous Galerkin finite element metho...
The effect of fluid flow, transport, and reaction on the shape evolution of two-dimensional cavities...
Replacement of wet etch processes in microelectronics manufacturing requires the development of new ...
In this paper we discuss the application of a space-time discontinuous Galerkin finite element metho...
177 p.Chemical Etching (CE) is an important production process for the fabrication of electronic dev...
ABSTRACT This article presents a total concentration method for two-dimensional wet chemical etching...
Abstract. In this paper we discuss the application of a space-time discontinuous Galerkin nite eleme...
We developed a simulation tool for the three-dimensional orientation-dependent wet etching of silico...
This publication is devoted to the numerical implementation of the mathematical model on a microscop...
International audienceA numerical model is proposed to simulate the isotropic wet etching of silicon...