A study on performance improvement of MEMS hair flow sensors by parametric amplification

Inspired by crickets and its perception for flow phenomena, artificial hair flow sensors have been developed successfully in our group. Improvement of fabrication methodologies have led to better performance, making it possible to detect and measure flow velocities in the range of sub-mm/s. To improve the performance of these sensors even further, we will make use of non-linear effects. In nature a wide range of such effects exist (filtering, parametric amplification, etc.) and can give a rise in sensitivity, dynamic range and selectivity