Add to ORKGIn this work, a miniaturized hotplate device with a low power consumption of a few milliwatts and a CMOS compatible fabrication process is proposed and analyzed. This micro hotplate is based on a nanoscopic conductive link (Ø 10- 100 nm) created between two electrodes separated by a SiO2 layer and can be used as chemical sensor and actuator. A typical foreseen application is a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. In this paper, simulation results are presented showing the electrical and thermal properties of these newly designed nanoscopic–link based devices. Index Terms— Hot Surface, Chemical Sensor, Chemical Actuator, Pel...
In this paper we propose novel micro-hotplate arrays for use as nanomaterial-based gas micro sensors...
This paper describes the design and characterisation of a new generation of fully CMOS compatible no...
A new microfabricated device for heating and sensing in gases is presented. It is based on the resis...
Abstract—In this work, a miniaturized hotplate device with a low power consumption of a few milliwat...
maintaining a hot surface by means of dissipating power at a nano-scale conductive link. The link is...
In this work, a new fabrication process is investigated for ultralow power, microelectronic hotplate...
This work employs the idea of maintaining a hot surface by means of dissipating power at a nano-scal...
Ultra low-power electrical hotplates are presented based on Ohmic heating of a small conductive volu...
We present a novel approach to produce a micromachined low cost hotplate gas sensor with reduced num...
In the sensors field the active sensing material frequently needs a controlled temperature in order ...
This work describes the results of a systematic investigation of micro-hotplates capable of operatin...
There has been an increasing demand of hand held battery operated gas monitors because of their wide...
In this paper we describe a new, simple and cheap silicon device operating at high temperature at a ...
This work employs the idea of making micro-scale hot-suvace devices (e.g. sensors, flow meters, micr...
This work employs the idea of making micro-scale hot-suvace devices (e.g. sensors, flow meters, micr...
In this paper we propose novel micro-hotplate arrays for use as nanomaterial-based gas micro sensors...
This paper describes the design and characterisation of a new generation of fully CMOS compatible no...
A new microfabricated device for heating and sensing in gases is presented. It is based on the resis...
Abstract—In this work, a miniaturized hotplate device with a low power consumption of a few milliwat...
maintaining a hot surface by means of dissipating power at a nano-scale conductive link. The link is...
In this work, a new fabrication process is investigated for ultralow power, microelectronic hotplate...
This work employs the idea of maintaining a hot surface by means of dissipating power at a nano-scal...
Ultra low-power electrical hotplates are presented based on Ohmic heating of a small conductive volu...
We present a novel approach to produce a micromachined low cost hotplate gas sensor with reduced num...
In the sensors field the active sensing material frequently needs a controlled temperature in order ...
This work describes the results of a systematic investigation of micro-hotplates capable of operatin...
There has been an increasing demand of hand held battery operated gas monitors because of their wide...
In this paper we describe a new, simple and cheap silicon device operating at high temperature at a ...
This work employs the idea of making micro-scale hot-suvace devices (e.g. sensors, flow meters, micr...
This work employs the idea of making micro-scale hot-suvace devices (e.g. sensors, flow meters, micr...
In this paper we propose novel micro-hotplate arrays for use as nanomaterial-based gas micro sensors...
This paper describes the design and characterisation of a new generation of fully CMOS compatible no...
A new microfabricated device for heating and sensing in gases is presented. It is based on the resis...