Add to ORKGMEMS fluidic devices often require the integration of sensor/actuator structures with freely suspended microchannels. This article presents a versatile microchannel fabrication concept, allowing for easy fluidic interfacing to the microchannel and integration of sensor/actuator structures in close proximity to the fluid. Several micro-fluidic device structures have been fabricated, demonstrating the concept
Microfluidics refers to devices and methods for controlling and manipulating fluid flows with length...
Through manipulating fluids using microfabricated channeland chamber structures, microfluidics is a ...
As an alternative to pick-and-place assembly techniques, recent research has lead to the development...
Abstract ⎯ MEMS fluidic devices often require the integration of sensor/actuator structures with fre...
Many microfluidic devices are made using specialized fabrication processes, limiting the ability to ...
Microfluidic devices often require channels of a specific size and shape. These devices are then mad...
MUMPs (Multi-User MEMS Process) based microchannels made of either glass or polysilicon have been su...
This paper presents the design and fabrication of a microfluidic structure on a glass substrate for ...
Bogunovic L, Vosskötter C, Anselmetti D. Fabrication of a microfluidic channel with differently modi...
Using surface micromachining technology, we fabricated nanofluidic devices with channels down to 10̂...
In the field of MEMS technology, the high accumulation and high density for making semiconductor dev...
As the demand for cooling is increased for high-density powered electronic devices, researchers have...
A silicon nanochannel system with integrated transverse electrodes was designed and fabricated by co...
This paper describes the development of polyimide-based microfluidic devices. A layer transfer and l...
Graduation date: 2011Novel fluidic devices that utilize an array of microchannels to achieve their d...
Microfluidics refers to devices and methods for controlling and manipulating fluid flows with length...
Through manipulating fluids using microfabricated channeland chamber structures, microfluidics is a ...
As an alternative to pick-and-place assembly techniques, recent research has lead to the development...
Abstract ⎯ MEMS fluidic devices often require the integration of sensor/actuator structures with fre...
Many microfluidic devices are made using specialized fabrication processes, limiting the ability to ...
Microfluidic devices often require channels of a specific size and shape. These devices are then mad...
MUMPs (Multi-User MEMS Process) based microchannels made of either glass or polysilicon have been su...
This paper presents the design and fabrication of a microfluidic structure on a glass substrate for ...
Bogunovic L, Vosskötter C, Anselmetti D. Fabrication of a microfluidic channel with differently modi...
Using surface micromachining technology, we fabricated nanofluidic devices with channels down to 10̂...
In the field of MEMS technology, the high accumulation and high density for making semiconductor dev...
As the demand for cooling is increased for high-density powered electronic devices, researchers have...
A silicon nanochannel system with integrated transverse electrodes was designed and fabricated by co...
This paper describes the development of polyimide-based microfluidic devices. A layer transfer and l...
Graduation date: 2011Novel fluidic devices that utilize an array of microchannels to achieve their d...
Microfluidics refers to devices and methods for controlling and manipulating fluid flows with length...
Through manipulating fluids using microfabricated channeland chamber structures, microfluidics is a ...
As an alternative to pick-and-place assembly techniques, recent research has lead to the development...