Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure

We present a normally open piezoelectric actuated micro valve, based on the novel concept of micro and fine machining technology. This new design allows a wide controllable range for high flow at a high pressure difference between inlet and outlet. This promising combination of micro and fine machining (piezoelectric actuator) provides the opportunity to take the steps that control the flow precisely. The use of piezoelectric actuator provides the opportunity of continuous control of gas flow at any stage during entire valve operation. In our previous design, larger steps caused by the friction between screw threads, limits the controllability [1]. Additionally the power consumption is low as piezoactuator needs power only to take steps to control the flow of gas