High-resolution integrated spectrometers in silicon-oxynitride

Arrayed Waveguide Grating Spectrometer on 2-µm-thick SOI Platform

Janvit Tippinit
Markku Kuittinen
Matthieu Roussey

October 2023

32-channel arrayed waveguide grating spectrometer (AWG) at 1800 nm is demonstrated on a 2-µm-thick s...

Fabrication of optical waveguide using silicon oxynitride prepared by thermal oxidation of silicon rich silicon nitride

Wong, C.K.
Wong, H.
Chan, Man Sun
Kok, C.W.
Chan, H.P.

January 2006

This work reports a method for reducing hydrogen content in silicon oxynitride film for integrated o...

Silicon oxynitride integrated waveguide for on-chip optical interconnects applications

Wong, C. K.
Wong, H.
Chan, Man Sun
Chow, Y. T.
Chan, H. P.

January 2008

This work explores the microfabrication technology for realizing miniature waveguide structure for o...

High Resolution Silicon-Oxynitride Arrayed Waveguide Grating Spectrometers

Akça, B.I.
Ismail, N.
Sengo, G.
Sun, F.
Worhoff, Kerstin
Pollnau, Markus
de Ridder, R.M.
Pozo, J.
Mortensen, M.
Urbach, P.
Leijtens, X
Yousefi, M.

January 2010

We present experimental results of silicon-oxynitride (SiON) based arrayed waveguide grating (AWG) s...

Integrated arrayed waveguide grating spectrometer for measuring Raman spectra

Ismail, Nur
Sun, Fei
Wörhoff, Kerstin
Driessen, Alfred
Ridder, René M. de
Pollnau, Markus

January 2011

We designed, fabricated and characterized on-chip integrated spectrometers in silicon oxynitride for...

Integrated arrayed waveguide grating spectrometer for on-chip optical coherence tomography

Akça, B.I.
Ismail, N.
Sun, F.
Nguyen, V.D.
Kalkman, J.
van Leeuwen, Ton
Driessen, A.
Worhoff, Kerstin
Pollnau, Markus
de Ridder, R.M.

May 2010

A silicon oxynitride based arrayed waveguide grating spectrometer was designed for on-chip spectral-...

Silicon oxynitride technology for integrated optical solutions in biomedical applications

Worhoff, Kerstin
Ismail, N.
Akça, B.I.
Pollnau, Markus
de Ridder, R.M.

June 2011

Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide r...

Integrated silicon spectrometers gain resolution, usability

Pavel Cheben
Adam Densmore
Siegfried Janz
Boris Lamontagne
Jean Lapointe
Edith Post
Jens Schmid
Phillip Waldron
Dan-xia Xu
Luisa Calvo
Oscar Martı́nez Matos

January 2015

Ultracompact broadband integrated components gather light efficiently and separate wavelengths with ...

Integrated spectrometers for spectral-domain optical coherence tomography

Akça, B.I.
Nguyen, V.D.
Kalkman, J.
van Leeuwen, Ton
Worhoff, Kerstin
de Ridder, R.M.
Pollnau, Markus

May 2011

We present experimental results of a spectral-domain optical coherence tomography system based on in...

Spectral domain optical coherence tomography imaging with an integrated optics spectrometer

Nguyen, V. Duc
Akça, B.I.
Worhoff, Kerstin
de Ridder, R.M.
Pollnau, Markus
van Leeuwen, Ton
Kalkman, Jeroen

April 2011

We designed and fabricated an arrayed-waveguide grating (AWG) in silicon oxynitride as a spectromete...

Toward Miniaturized Optical Coherence Tomography

Akça, B.I.
Nguyen, V.D.
Kalkman, J.
van Leeuwen, Ton
Worhoff, Kerstin
de Ridder, R.M.
Pollnau, Markus

April 2011

Optical coherence tomography (OCT) is a widely used optical imaging technology with an increasing nu...

III-V-on-silicon integrated micro - Spectrometer for the 3 μm wavelength range

Muneeb, M.
Vasiliev, A.
Ruocco, A.
Malik, A.
Chen, H.
Nedeljkovic, M.
Penades, J.S.
Cerutti, L.
Rodriguez, J.B.
Mashanovich, G.Z.
Smit, M.K.
Tourni, E.
Roelkens, G.

May 2016

A compact (1.2 mm2) fully integrated mid-IR spectrometer operating in the 3 μm wavelength range is p...

Integrated AWG spectrometer for on-chip optical coherence tomography and Raman spectroscopy

Akça, B.I.
Ismail, N.
Sun, F.
Driessen, A.
Worhoff, Kerstin
Pollnau, Markus
de Ridder, R.M.
Nguyen, V.D.
Kalkman, J.
van Leeuwen, Ton

January 2010

Silicon oxynitride-based arrayed waveguide grating (AWG) spectrometers were designed for on-chip spe...

Toward spectral-domain optical coherence tomography on a chip

Akça, B.I.
Nguyen, V.D.
Kalkman, J.
Ismail, N.
Sengo, G.
Sun, F.
Driessen, A.
van Leeuwen, Ton
Pollnau, Markus
Worhoff, Kerstin
de Ridder, R.M.

May 2012

We present experimental results of a spectral-domain optical coherence tomography system based on an...

T O R

C. Gorecki

October 2016

Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated b...

Arrayed Waveguide Grating Spectrometer on 2-µm-thick SOI Platform

Janvit Tippinit
Markku Kuittinen
Matthieu Roussey

October 2023

32-channel arrayed waveguide grating spectrometer (AWG) at 1800 nm is demonstrated on a 2-µm-thick s...

Fabrication of optical waveguide using silicon oxynitride prepared by thermal oxidation of silicon rich silicon nitride

Wong, C.K.
Wong, H.
Chan, Man Sun
Kok, C.W.
Chan, H.P.

January 2006

This work reports a method for reducing hydrogen content in silicon oxynitride film for integrated o...

Silicon oxynitride integrated waveguide for on-chip optical interconnects applications

Wong, C. K.
Wong, H.
Chan, Man Sun
Chow, Y. T.
Chan, H. P.

January 2008

This work explores the microfabrication technology for realizing miniature waveguide structure for o...

High Resolution Silicon-Oxynitride Arrayed Waveguide Grating Spectrometers

Akça, B.I.
Ismail, N.
Sengo, G.
Sun, F.
Worhoff, Kerstin
Pollnau, Markus
de Ridder, R.M.
Pozo, J.
Mortensen, M.
Urbach, P.
Leijtens, X
Yousefi, M.

January 2010

We present experimental results of silicon-oxynitride (SiON) based arrayed waveguide grating (AWG) s...

Integrated arrayed waveguide grating spectrometer for measuring Raman spectra

Ismail, Nur
Sun, Fei
Wörhoff, Kerstin
Driessen, Alfred
Ridder, René M. de
Pollnau, Markus

January 2011

We designed, fabricated and characterized on-chip integrated spectrometers in silicon oxynitride for...

Integrated arrayed waveguide grating spectrometer for on-chip optical coherence tomography

Akça, B.I.
Ismail, N.
Sun, F.
Nguyen, V.D.
Kalkman, J.
van Leeuwen, Ton
Driessen, A.
Worhoff, Kerstin
Pollnau, Markus
de Ridder, R.M.

May 2010

A silicon oxynitride based arrayed waveguide grating spectrometer was designed for on-chip spectral-...

Silicon oxynitride technology for integrated optical solutions in biomedical applications

Worhoff, Kerstin
Ismail, N.
Akça, B.I.
Pollnau, Markus
de Ridder, R.M.

June 2011

Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide r...

Integrated silicon spectrometers gain resolution, usability

Pavel Cheben
Adam Densmore
Siegfried Janz
Boris Lamontagne
Jean Lapointe
Edith Post
Jens Schmid
Phillip Waldron
Dan-xia Xu
Luisa Calvo
Oscar Martı́nez Matos

January 2015

Ultracompact broadband integrated components gather light efficiently and separate wavelengths with ...

Integrated spectrometers for spectral-domain optical coherence tomography

Akça, B.I.
Nguyen, V.D.
Kalkman, J.
van Leeuwen, Ton
Worhoff, Kerstin
de Ridder, R.M.
Pollnau, Markus

May 2011

We present experimental results of a spectral-domain optical coherence tomography system based on in...

Spectral domain optical coherence tomography imaging with an integrated optics spectrometer

Nguyen, V. Duc
Akça, B.I.
Worhoff, Kerstin
de Ridder, R.M.
Pollnau, Markus
van Leeuwen, Ton
Kalkman, Jeroen

April 2011

We designed and fabricated an arrayed-waveguide grating (AWG) in silicon oxynitride as a spectromete...

Toward Miniaturized Optical Coherence Tomography

Akça, B.I.
Nguyen, V.D.
Kalkman, J.
van Leeuwen, Ton
Worhoff, Kerstin
de Ridder, R.M.
Pollnau, Markus

April 2011

Optical coherence tomography (OCT) is a widely used optical imaging technology with an increasing nu...

III-V-on-silicon integrated micro - Spectrometer for the 3 μm wavelength range

Muneeb, M.
Vasiliev, A.
Ruocco, A.
Malik, A.
Chen, H.
Nedeljkovic, M.
Penades, J.S.
Cerutti, L.
Rodriguez, J.B.
Mashanovich, G.Z.
Smit, M.K.
Tourni, E.
Roelkens, G.

May 2016

A compact (1.2 mm2) fully integrated mid-IR spectrometer operating in the 3 μm wavelength range is p...

Integrated AWG spectrometer for on-chip optical coherence tomography and Raman spectroscopy

Akça, B.I.
Ismail, N.
Sun, F.
Driessen, A.
Worhoff, Kerstin
Pollnau, Markus
de Ridder, R.M.
Nguyen, V.D.
Kalkman, J.
van Leeuwen, Ton

January 2010

Silicon oxynitride-based arrayed waveguide grating (AWG) spectrometers were designed for on-chip spe...

Toward spectral-domain optical coherence tomography on a chip

Akça, B.I.
Nguyen, V.D.
Kalkman, J.
Ismail, N.
Sengo, G.
Sun, F.
Driessen, A.
van Leeuwen, Ton
Pollnau, Markus
Worhoff, Kerstin
de Ridder, R.M.

May 2012

We present experimental results of a spectral-domain optical coherence tomography system based on an...

T O R

C. Gorecki

October 2016

Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated b...

Arrayed Waveguide Grating Spectrometer on 2-µm-thick SOI Platform

Janvit Tippinit
Markku Kuittinen
Matthieu Roussey

October 2023

32-channel arrayed waveguide grating spectrometer (AWG) at 1800 nm is demonstrated on a 2-µm-thick s...

Fabrication of optical waveguide using silicon oxynitride prepared by thermal oxidation of silicon rich silicon nitride

Wong, C.K.
Wong, H.
Chan, Man Sun
Kok, C.W.
Chan, H.P.

January 2006

This work reports a method for reducing hydrogen content in silicon oxynitride film for integrated o...

Silicon oxynitride integrated waveguide for on-chip optical interconnects applications

Wong, C. K.
Wong, H.
Chan, Man Sun
Chow, Y. T.
Chan, H. P.

January 2008

This work explores the microfabrication technology for realizing miniature waveguide structure for o...

High-resolution integrated spectrometers in silicon-oxynitride

Abstract

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High-resolution integrated spectrometers in silicon-oxynitride

Abstract

Extracted data

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