Fabrication of mechano-optical sensors for hydrogen gas

We present results related to the fabrication of a novel and highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using MEMS techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed and solutions to address these issues will be given as well