A Musical instrument in MEMS

Engelen, Johannes Bernardus Charles
de Boer, Hans L.
de Boer, H.
Beekman, J.G.
Been, A.J.
Folkertsma, Gerrit Adriaan
Folkertsma, G.A.
Fortgens, L.
de Graaf, D.
Vocke, S.
Woldering, L.A.
Abelmann, Leon
Elwenspoek, Michael Curt

Publisher

University of Twente - Transducers Science and Technology (TST)

Abstract

In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion

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A Musical instrument in MEMS

Abstract

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A Musical instrument in MEMS

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