In this paper we present Finite Element models to optimize the Lorentz force actuation of a micro Coriolis mass flow sensor. The models specify several different configurations for the permanent magnets used to create the magnetic field for the actuation. The models are used to compare the different configurations with relation to the strength of the Lorentz force used for actuation. Using these models the magnetic field outside the sensor area has been reduced by 6 orders of magnitude. The models have been validated with measurements
Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sens...
The paper presents the experimental results and performance indexes of a new z-axis Lorentz force ME...
This paper discusses the design and realization of a micromachined micro Coriolis flow sensor with i...
In this paper we present Finite Element models to optimize the Lorentz force actuation of a micro Co...
AbstractIn this paper we present Finite Element models to optimize the Lorentz force actuation of a ...
In this paper we present Finite Element models to optimize the Lorentz force actuation of a micro Co...
In this paper we present a significant reduction in size of a micromachined Coriolis mass flow senso...
In this paper we present and compare three different magnet configurations for Lorentz actuation of ...
In this paper, we propose a multiphysics-based optimization of the geometry of a microbeam, which re...
We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride res...
We have developed a multi-axis flexible body model with which we can investigate the behavior of (mi...
This paper discusses the modeling, design and realization of micromachined Coriolis mass flow sensor...
The force (F) and the power consumption (P) of a magnetic actuator are modeled, measured and optimiz...
A new z-axis Lorentz force microelectromechanical systems magnetometer was designed, fabricated, and...
Abstract This work presents the modelling, design, fabrication and test of the first micro Coriolis ...
Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sens...
The paper presents the experimental results and performance indexes of a new z-axis Lorentz force ME...
This paper discusses the design and realization of a micromachined micro Coriolis flow sensor with i...
In this paper we present Finite Element models to optimize the Lorentz force actuation of a micro Co...
AbstractIn this paper we present Finite Element models to optimize the Lorentz force actuation of a ...
In this paper we present Finite Element models to optimize the Lorentz force actuation of a micro Co...
In this paper we present a significant reduction in size of a micromachined Coriolis mass flow senso...
In this paper we present and compare three different magnet configurations for Lorentz actuation of ...
In this paper, we propose a multiphysics-based optimization of the geometry of a microbeam, which re...
We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride res...
We have developed a multi-axis flexible body model with which we can investigate the behavior of (mi...
This paper discusses the modeling, design and realization of micromachined Coriolis mass flow sensor...
The force (F) and the power consumption (P) of a magnetic actuator are modeled, measured and optimiz...
A new z-axis Lorentz force microelectromechanical systems magnetometer was designed, fabricated, and...
Abstract This work presents the modelling, design, fabrication and test of the first micro Coriolis ...
Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sens...
The paper presents the experimental results and performance indexes of a new z-axis Lorentz force ME...
This paper discusses the design and realization of a micromachined micro Coriolis flow sensor with i...